Announcement of an Opportunity to Join a Cooperative Research and Development Consortium for CD-Metrology Below 0.25 Microns

摘要

The National Institute of Standards and Technology invites interested parties to attend a meeting on January 9, 1998, to discuss setting up a cooperative research consortium. The goal of the consortium is to achieve commercially available reference standards to support CD-metrology for feature linewidths below 0.25 microns. Parties participating in the consortium will be loaned (110) and (100) BESO1 chips and asked to perform a selection of CD measurements.