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Réglementation et droit · 10/12/19971 min de lecture
Announcement of an Opportunity to Join a Cooperative Research and Development Consortium for CD-Metrology Below 0.25 Microns
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Résumé
The National Institute of Standards and Technology invites interested parties to attend a meeting on January 9, 1998, to discuss setting up a cooperative research consortium. The goal of the consortium is to achieve commercially available reference standards to support CD-metrology for feature linewidths below 0.25 microns. Parties participating in the consortium will be loaned (110) and (100) BESO1 chips and asked to perform a selection of CD measurements.
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