Announcement of an Opportunity To Join a Cooperative Research and Development Consortium for CD-Metrology Below 0.25 Microns

Samenvatting

The National Institute of Standards and Technology invites interested parties to attend a meeting on November 12, 1996 to discuss setting up a cooperative research consortium. The goal of the consortium is to achieve commercially available reference standards to support CD-metrology below 0.25 microns. Parties participating in the consortium will be loaned a premeasured prototype sample for evaluation. The program will be within the scope and confines of The Federal Technology Transfer Act of 1986 (Public Law 99-502, 15 U.S.C. 3710a), which provides federal laboratories including NIST, with the authority to enter into cooperative research agreements with qualified parties. Under this law, NIST may contribute personnel, equipment, and facilities--but no funds--to the cooperative research program. Members will be expected to make a contribution to the consortium's efforts in the form of personnel, and/or funds. This is not a grant program.